Исследование параметров плазмы реактивного магнетронного разряда с помощью зонда Ленгмюра

Abstract

One of the most prospective methods of making the biocompatible coatings is reactive magnetron sputtering. It allows obtaining coatings with well controllable chemical composition. In order to control magnetron plasma parametersa Langmuir probe is widely used. A method for probe data processing has been developed. It includes raw data averaging and least-square methods for determining of plasma parameters such as electron temperature and ion density. The averaging is used in order to reduce an impact of data oscillations caused by proximity of probe and discharge frequencies. Using the method, plasma discharge parameters dependence on reactive gas mixture type has been investigated.