Microstructure and properties of nanocomposite Al-Si-N system coatings produced by magnetron sputtering

Abstract

The paper presents the results of investigations of the structural and phase conditions, mechanical and optical properties of Al-Si-N system coating obtained by magnetron sputtering. The thickness of this coating ranges from 3 to 19 [mu]m and is sprayed on silica glass using magnetron sputtering technique. The formation of nanoscale AlN single phase with HCP crystal system and the crystal grain size of up to 20 nm is discovered using the X-ray diffraction method. The texture of [002] orientation is observed in the structure of Al-Si-N-based coatings. These coatings are characterized by high values of microhardness and coefficient of restitution. The transmission spectrum of the coatings are produced within the range of 190-1100 nm. Al-Si-N-based coatings are characterized by a high degree of transparency (≈ 80%) within the visible light spectrum and complete opaqueness in the ultraviolet region. The refractive index and the thickness of Al-Si-N system coating are determined using the transmission spectrum and refractive index. The refractive index of Al-Si-N-coated glass samples is determined using the transmission spectrum the value of which increases with the increase in the coating thickness.