Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/57741
Title: Temperature gradients in targets with high-intensity implantation and their influence on the characteristics of ion-modified layers
Authors: Ryabchikov, Aleksandr Ilyich
Lopatin, I. V.
Ananin, Petr Semenovich
Bleicher, Galina Alekseevna
Ivanova, Anna Ivanovna
Koval, Tamara Vasilievna
Modebadze, Georgy Slavovich
Sivin, Denis Olegovich
Keywords: имплантация; мишени; ионно-модифицированные слои; температурные поля; металлические мишени; интенсивные пучки; ионы металлов; температурные градиенты
Issue Date: 2019
Citation: Temperature gradients in targets with high-intensity implantation and their influence on the characteristics of ion-modified layers / A. I. Ryabchikov [et al.] // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 51].
URI: http://earchive.tpu.ru/handle/11683/57741
Appears in Collections:Материалы конференций

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