Влияние типа прекурсора на размер частиц нитрида алюминия, получаемого плазмодинамическим способом

Abstract

Aluminum nitride is prospective material due to its high thermal conductivity and low dielectric constant. This paper shows the results of obtaining aluminum nitride by plasma dynamic method in systems with gaseous (nitrogen N2) and solid (melamine C3N6H6) precursors. The influence of precursor type on energy characteristics of synthesis process and particle size distribution were investigated using oscillograms and brightfield TEM images. The results show that the use of solid precursor is directly influenced on decreasing of energy parameters and increasing of particle size distribution. This fact is connected with the presence of hydrogen in melamine, which after releasing decreases the temperature of plasma.