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http://earchive.tpu.ru/handle/11683/33894
Полная запись метаданных
Поле DC | Значение | Язык |
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dc.contributor.author | Umnov, Sergey Pavlovich | en |
dc.contributor.author | Asainov, Oleg Khaydarovich | en |
dc.contributor.author | Temenkov, V. | en |
dc.date.accessioned | 2016-11-24T10:07:00Z | - |
dc.date.available | 2016-11-24T10:07:00Z | - |
dc.date.issued | 2016 | - |
dc.identifier.citation | Umnov S. P. Radiation-induced deposition of transparent conductive tin oxide coatings / S. P. Umnov, O. Kh. Asainov, V. Temenkov // IOP Conference Series: Materials Science and Engineering. — 2016. — Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015) : International Conference, 1–4 December 2015, Tomsk, Russia : [proceedings]. — [012148, 5 p.]. | ru |
dc.identifier.uri | http://earchive.tpu.ru/handle/11683/33894 | - |
dc.description.abstract | The study of tin oxide films is stimulated by the search for an alternative replacement of indium-tin oxide (ITO) films used as transparent conductors, oxidation catalysts, material gas sensors, etc. This work was aimed at studying the influence of argon ions irradiation on optical and electrical characteristics of tin oxide films. Thin films of tin oxide (without dopants) were deposited on glass substrates at room temperature using reactive magnetron sputtering. After deposition, the films were irradiated with an argon ion beam. The current density of the beam was (were) 2.5 mA/cm{2}, and the particles energy was 300-400 eV. The change of the optical and electrical properties of the films depending on the irradiation time was studied. Films optical properties were investigated by photometry in the range of 300-1100 nm. Films structural properties were studied using X-ray diffraction. The diffractometric research showed that the films, deposited on a substrate, had a crystal structure, and after argon ions irradiation they became quasi-crystalline (amorphous). It has been found that the transmission increases proportionally with the irradiation time, however the sheet resistance increases disproportionally. Tin oxide films (thickness ~30 nm) with ~100% transmittance and sheet resistance of ~100 kOhm/sq. were obtained. The study has proved to be prospective in the use of ion beams to improve the properties of transparent conducting oxides. | en |
dc.language.iso | en | en |
dc.publisher | IOP Publishing | ru |
dc.relation.ispartof | IOP Conference Series: Materials Science and Engineering. Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015). — Bristol, 2016. | ru |
dc.rights | info:eu-repo/semantics/openAccess | en |
dc.subject | радиационно-стимулированное осаждение | ru |
dc.subject | прозрачные покрытия | ru |
dc.subject | оксид олова | ru |
dc.subject | оптические характеристики | ru |
dc.subject | электрические характеристики | ru |
dc.subject | пленки | ru |
dc.subject | магнетронное распыление | ru |
dc.subject | фотометрия | ru |
dc.subject | ионные пучки | ru |
dc.subject | стеклянные подложки | ru |
dc.subject | ионы аргона | ru |
dc.title | Radiation-induced deposition of transparent conductive tin oxide coatings | en |
dc.type | Conference Paper | en |
dc.type | info:eu-repo/semantics/publishedVersion | en |
dc.type | info:eu-repo/semantics/conferencePaper | en |
dcterms.audience | Researches | en |
local.department | Национальный исследовательский Томский политехнический университет (ТПУ)::Физико-технический институт (ФТИ)::Кафедра технической физики (№ 23) (ТФ)::Лаборатория № 16 | ru |
local.description.firstpage | 12148 | - |
local.filepath | http://dx.doi.org/10.1088/1757-899X/124/1/012148 | - |
local.identifier.bibrec | RU\TPU\network\13779 | - |
local.identifier.colkey | RU\TPU\col\19671 | - |
local.identifier.perskey | RU\TPU\pers\34215 | - |
local.identifier.perskey | RU\TPU\pers\34632 | - |
local.localtype | Доклад | ru |
local.volume | 124 | - |
local.conference.name | Mechanical Engineering, Automation and Control Systems (MEACS2015) | - |
local.conference.date | 2015 | - |
dc.identifier.doi | 10.1088/1757-899X/124/1/012148 | - |
Располагается в коллекциях: | Материалы конференций |
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Файл | Описание | Размер | Формат | |
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dx.doi.org-10.1088-1757-899X-124-1-012148.pdf | 813,51 kB | Adobe PDF | Просмотреть/Открыть |
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