???jsp.display-item.identifier??? http://earchive.tpu.ru/handle/11683/35862
???metadata.dc.title???: A comparative study on the properties of chromium coatings deposited by agnetron sputtering with hot and cooled cathode
???metadata.dc.contributor.author???: Bestetti, Massimiliano
Vicenzo, Antonello
Franz, Silvia
Francesca Brunella, Maria
Sidelev, Dmitry Vladimirovich
Bleykher, Galina Alekseevna
Krivobokov, Valery Pavlovich
???metadata.dc.subject???: сравнительные исследования; хромовые покрытия; магнетронное распыление; холодные катоды; выпаривание; осаждение; magnetron sputtering; hot target; evaporation; chromium; high deposition rate
???metadata.dc.date.issued???: 2016
???metadata.dc.identifier.citation???: A comparative study on the properties of chromium coatings deposited by agnetron sputtering with hot and cooled cathode / M. Bestetti [et al.] // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 338].
???metadata.dc.identifier.uri???: http://earchive.tpu.ru/handle/11683/35862
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