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Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/39483
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dc.contributor.authorKalin, B. A.en
dc.contributor.authorVolkov, N. V.en
dc.contributor.authorValikov, R. A.en
dc.contributor.authorYashin, A. S.en
dc.contributor.authorKrivobokov, Valery Pavlovichen
dc.contributor.authorYanin, Sergey Nikolaevichen
dc.contributor.authorYuriev, Yuri Nikolaevichen
dc.date.accessioned2017-06-08T04:19:05Z-
dc.date.available2017-06-08T04:19:05Z-
dc.date.issued2017-
dc.identifier.citationAnalysis of work and efficiency increase of of the ILUR-03 installation magnetron system for tubular specimens outer surface modification / B. A. Kalin [et al.] // Journal of Physics: Conference Series. — 2017. — Vol. 830 : Energy Fluxes and Radiation Effects 2016 : 5th International Congress, 2–7 October 2016, Tomsk, Russian Federation : [materials]. — [012058, 4 p.].ru
dc.identifier.urihttp://earchive.tpu.ru/handle/11683/39483-
dc.description.abstractThe method of material near-surface layers doping by mixing of alloying elements films with ion beam is widely used in science and technology. Three magnetrons with independent power systems, integrated in installation for ion-beam treatment of long-range products ILUR-03, were used as deposition systems. Targets for magnetrons were in the form of disks 60 mm diameter and 5 mm thickness and consisted of the following elements: Al, Fe, Mo, Zr, Cr of purity better than 99.99 at.%. Deposition was performed in argon atmosphere at 1-5 Pa pressure and room temperature in stable current mode at 30-100 mA. Analysis of the obtained films on the surface of cylindrical specimens from zirconium alloys with the outer diameter of 9.15 mm showed high uniformity of coating on length of 300 mm, good adhesion and absence of discontinuities in the films body.en
dc.language.isoenen
dc.publisherIOP Publishingru
dc.relation.ispartofJournal of Physics: Conference Series. Vol. 830 : Energy Fluxes and Radiation Effects 2016. — Bristol, 2017.ru
dc.rightsinfo:eu-repo/semantics/openAccessen
dc.subjectэффективностьru
dc.subjectустановкиru
dc.subjectмагнетронные системыru
dc.subjectнаружные поверхностиru
dc.subjectтрубчатые образцыru
dc.subjectлегированиеru
dc.subjectметаллыru
dc.subjectионно-лучевая обработкаru
dc.subjectмагнетроныru
dc.subjectпленкиru
dc.subjectциркониевые сплавыru
dc.subjectадгезияru
dc.titleAnalysis of work and efficiency increase of of the ILUR-03 installation magnetron system for tubular specimens outer surface modificationen
dc.typeConference Paperen
dc.typeinfo:eu-repo/semantics/publishedVersionen
dc.typeinfo:eu-repo/semantics/conferencePaperen
dcterms.audienceResearchesen
local.departmentНациональный исследовательский Томский политехнический университет (ТПУ)::Физико-технический институт (ФТИ)::Кафедра экспериментальной физики (ЭФ)ru
local.description.firstpage12058-
local.filepathhttp://dx.doi.org/10.1088/1742-6596/830/1/012058-
local.identifier.bibrecRU\TPU\network\20627-
local.identifier.colkeyRU\TPU\col\21255-
local.identifier.perskeyRU\TPU\pers\30416-
local.identifier.perskeyRU\TPU\pers\35099-
local.identifier.perskeyRU\TPU\pers\31508-
local.localtypeДокладru
local.volume8302016-
local.conference.nameEnergy Fluxes and Radiation Effects 2016-
local.conference.date2016-
dc.identifier.doi10.1088/1742-6596/830/1/012058-
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