Synthesis and Physicochemical Properties of SiO[2]-Ta[2]O[5] Thin-Film Systems and Powders

Abstract

Within the research, SiO[2]-Ta[2]O[5] films from film-forming solutions based on tetraethoxysilane and tantalum chloride (V) are synthesized. Physicochemical patterns and specifics of producing the films are determined by means of IR spectroscopy and thermogravimetric analysis. The processes of SiO[2]-Ta[2]O[5] films formation are studied. Interrelation between SiO[2]-Ta[2]O[5] composition, concentration of incoming components and their physicochemical properties are revealed.