Thermal transformations of aluminium-aluminium oxide systems in nanosize layers

Abstract

Aluminium film of more than 2 nm thick indicates, but less than 2 nm do not indicate characteristic absorption and reflection bands for aluminium in range ?=190...1100 nm. By spectrophotometric, gravimetric and microscopic methods it is stated that thickness, mass and absorption, reflection spectrum of aluminium films (d=2...200 nm) undergo considerable transformations as a result of heat treatment in an interval of temperatures 373...600 K during 1...140 min in atmospheric conditions. Kinetic curve of transformation degrees, change of thickness and weights of samples are shown to be satisfactorily described in the context of the logarithmic law. It is established that changes of absorption spectra, thickness and weights of aluminium films are connected with the formation of aluminium oxide on their surface.