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Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/57759
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dc.contributor.authorBleykher, Galina Alekseevnaen
dc.contributor.authorYuryeva, Alena Victorovnaen
dc.contributor.authorShabunin, Artem Sergeevichen
dc.contributor.authorSidelev, Dmitry Vladimirovichen
dc.contributor.authorGrudinin, Vladislav Alekseevichen
dc.date.accessioned2020-01-31T09:23:59Z-
dc.date.available2020-01-31T09:23:59Z-
dc.date.issued2019-
dc.identifier.citationFeatures of self-sustained magnetron sputtering of evaporating metal target / G. A. Bleykher [et al.] // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 277].en
dc.identifier.urihttp://earchive.tpu.ru/handle/11683/57759-
dc.language.isoenen
dc.relation.ispartofGas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia. — Tomsk, 2019.ru
dc.rightsinfo:eu-repo/semantics/openAccessen
dc.subjectмагнетронное распылениеru
dc.subjectметаллические мишениru
dc.subjectмагнетроныru
dc.subjectосаждениеru
dc.subjectпокрытияru
dc.subjectсамораспылениеru
dc.subjectмагнетронные распылительные системыru
dc.titleFeatures of self-sustained magnetron sputtering of evaporating metal targeten
dc.typeConference Paperen
dc.typeinfo:eu-repo/semantics/publishedVersionen
dc.typeinfo:eu-repo/semantics/conferencePaperen
dcterms.audienceResearchesen
local.description.firstpage277-
local.filepathconference_tpu-2019-C108_p277.pdf-
local.identifier.bibrecRU\TPU\conf\32453-
local.identifier.perskeyRU\TPU\pers\31496-
local.identifier.perskeyRU\TPU\pers\33389-
local.identifier.perskeyRU\TPU\pers\37139-
local.identifier.perskeyRU\TPU\pers\34524-
local.identifier.perskeyRU\TPU\pers\42519-
local.localtypeДокладru
local.conference.nameGas Discharge Plasmas and Their Applications (GDP 2019)-
local.conference.date2019-
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