Влияние расстояния до подложки на процесс формирования покрытия из кубического карбида вольфрама плазмодинамическим методом

Abstract

The paper shows the possibility of obtaining coatings from cubic tungsten carbide by the plasma dynamic method. According to X-ray phase analysis, the coating consists mainly of cubic tungsten carbide (up to 97%), hexagonal modifications - W2C and WC, also unreacted tungsten and carbon. The optimal location of the substrate relative to the cut of the graphite electrode-barrel was determined, which provides the maximum content of cubic tungsten carbide, as well as the largest deposition area, which amounted to 55÷65 mm.