Моделирование магнитной подсистемы планарного магнетрона

Abstract

Magnetron sputtering systems are commonly used to change the functional properties of materials by applying thin-film coatings. In this work, we have simulated the magnetic field of the magnetic subsystem of a planar magnetron magnetron sputtering system in a 17 mm above target in increments of 1 cm by z-component using the Wolfram Mathematica 13.1 and Elcut. The dependence of the magnetic field on the distance from the target is provided and discussed. The simulation results, over a range of considered distances, are in good agreement with an experimental study. The developed module can be used for designing a magnetron system based on the created model