Разработка метода отделения тонких пленок анодного оксида алюминия от подложки

Abstract

Fast electrochemical separation of anodic porous alumina (APA) film formed through anodized alumina substrates was achieved. Formed on aluminum surfaces by anodizing the substrate in a 0.3 M oxalic acid solution at 60 V. A reverse voltage is then applied. In the constant current (0.2A) mode, after 2.5 hours of reaction at 30°C, the film and the aluminum substrate appeared to be separated. This may be due to the formation of extremely small via holes at the bottom barrier oxide layer of the APA film, followed by the subsequent dissolution of aluminum from the substrate. APA through-porous membranes can be successfully prepared by subsequent immersion in 5% phosphoric acid solution.