Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/35854| Title: | Influence of repetitively-pulsed plasma immersion low energy on implantation to tin coating properties formation |
| Authors: | Sivin, Denis Olegovich Ananjin, Petr Semenovich Dektyarev, Sergey Valentinovich Ryabchikov, Aleksandr Ilyich Shevelev, Aleksey Eduardovich Korneva, Olga Sergeevna |
| Keywords: | энергия; имплантация; покрытия; олово; нитрид титана; вакуумные дуги; смещения; titanium nitride coating; vacuum arc; negative high-frequency short-pulsed bias |
| Issue Date: | 2016 |
| Citation: | Influence of repetitively-pulsed plasma immersion low energy on implantation to tin coating properties formation / D. O. Sivin [et al.] // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 314]. |
| URI: | http://earchive.tpu.ru/handle/11683/35854 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2016-C117_p315.pdf | 218,17 kB | Adobe PDF | View/Open |
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