Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/35857
Title: | Characterzations of nitrogen-doped titanium dioxide films prepared by reactive magnetron sputtering deposition |
Authors: | Pichugin, Vladimir Fyodorovich Pustovalova, Alla Aleksandrovna |
Keywords: | легирование; азот; пленки; диоксид титана; осаждение; реактивное распыление; магнетронное распыление; магнетроны; magnetron; sputtering; TiON films |
Issue Date: | 2016 |
Citation: | Pichugin V. F. Characterzations of nitrogen-doped titanium dioxide films prepared by reactive magnetron sputtering deposition / V. F. Pichugin, A. A. Pustovalova // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 321]. |
URI: | http://earchive.tpu.ru/handle/11683/35857 |
Appears in Collections: | Материалы конференций |
Files in This Item:
File | Description | Size | Format | |
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conference_tpu-2016-C117_p322.pdf | 228,51 kB | Adobe PDF | View/Open |
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