Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/35861| Title: | The phase and elemental co mposition of fil tered arc evaporated TiAlN coatings using separate cathodes |
| Authors: | Sutygina, Alina Nikolaevna Kashkarov, Egor Borisovich Shulepov, Ivan Nikitenkov, Nikolai Nikolaevich Pryamushko, Tatiana Sergeevna |
| Keywords: | элементный состав; покрытия; катоды; дуги; вакуумно-дуговое осаждение; фазовый состав; elemental distribution; vacuum arc deposition; phase composition |
| Issue Date: | 2016 |
| Citation: | The phase and elemental co mposition of fil tered arc evaporated TiAlN coatings using separate cathodes / A. N. Sutygina [et al.] // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 332]. |
| URI: | http://earchive.tpu.ru/handle/11683/35861 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2016-C117_p333.pdf | 220,38 kB | Adobe PDF | View/Open |
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