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http://earchive.tpu.ru/handle/11683/35865
Title: | CVD synthesis of BN and BCN coatings using trimethylborate precursor |
Authors: | Linnik, Stepan Andreevich Gaydaychuk, Alexander Valerievich Okhotnikov, Vitaly Vladimirovich |
Keywords: | синтез; покрытия; сердечно-сосудистые заболевания; плазма тлеющего разряда; CVD synthesis; boronnitride; boron carbonitride; glow discharge plasma |
Issue Date: | 2016 |
Citation: | Linnik S. A. CVD synthesis of BN and BCN coatings using trimethylborate precursor / S. A. Linnik, A. V. Gaydaychuk, V. V. Okhotnikov // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 346]. |
URI: | http://earchive.tpu.ru/handle/11683/35865 |
Appears in Collections: | Материалы конференций |
Files in This Item:
File | Description | Size | Format | |
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conference_tpu-2016-C117_p347.pdf | 216,5 kB | Adobe PDF | View/Open |
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