Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/37223
Title: High intensity plasma immersion metal ion beam source for surface modification of materials
Authors: Ryabchikov, Aleksandr Ilyich
Ananjin, Petr Semenovich
Dektyarev, Sergey Valentinovich
Shevelev, Aleksey Eduardovich
Sivin, Denis Olegovich
Keywords: Vacuum arc; Plasma; Ion beams; Repetitively pulsed bias; вакуумные дуги; плазма; ионные пучки; поверхности; материалы
Issue Date: 2016
Citation: High intensity plasma immersion metal ion beam source for surface modification of materials / A. I. Ryabchikov [et al.] // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 178].
URI: http://earchive.tpu.ru/handle/11683/37223
Appears in Collections:Материалы конференций

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