Оптимизация требований к порошкам цинкзамещенного гидроксиапатита с целью обеспечения фазового состава мишеней для ВЧ магнетронного распыления

Abstract

In the present study, target sintering using the powders of Zn-substituted hydroxyapatites was described in detail. It was shown that the powders' specific surface influencing the parameters of sintering that involves uniaxial pressing and annealing. The level of crystallinity of initial Zn-substituted hydroxyapatite powder and targets for RF-magnetron sputtering sintered at various temperature were analyzed using X-ray diffraction. It was found that the sintering leads to removing of zinc oxide phase. The one stage target sintering in the air with desired phase composition is possible by using powders characterized by a specific surface of 40-60 m{2}/g.