Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/57378
Title: Operation parameters of magnetron diode for high-rate deposition of aluminum films
Authors: Sidelev, Dmitry Vladimirovich
Grudinin, Vladislav Alekseevich
Keywords: магнетронный разряд; плазма; осаждение; алюминиевые пленки
Issue Date: 2018
Publisher: IOP Publishing
Citation: Sidelev D. V. Operation parameters of magnetron diode for high-rate deposition of aluminum films / D. V. Sidelev, V. A. Grudinin // Journal of Physics: Conference Series. — 2018. — Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects"14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM) : [proceedings], 16-22 September 2018, Tomsk, Russian Federation. — [032020, 5 p.].
Abstract: This article reports on the results of the detailed study of erosion of Al target in magnetron discharge plasma. It was demonstrated that the combination of middle-frequency (MF) and high impulse power (HiPIMS) power supply results in the significant increase of deposition rates of Al films by changing of sputtering yield. The MF pulse assists HiPIMS discharge to transit in a high power mode.
URI: http://earchive.tpu.ru/handle/11683/57378
Appears in Collections:Материалы конференций

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