Please use this identifier to cite or link to this item:
Title: High-rate deposition of chromium coatings by magnetron sputtering
Authors: Sidelev, Dmitry Vladimirovich
Bleykher, Galina Alekseevna
Grudinin, Vladislav Alekseevich
Krivobokov, Valery Pavlovich
Bestetti, Massimiliano
Keywords: высокоскоростное осаждение; хромовые покрытия; магнетронное распыление; мишени; подложки
Issue Date: 2019
Citation: High-rate deposition of chromium coatings by magnetron sputtering / D. V. Sidelev [et al.] // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 192].
Appears in Collections:Материалы конференций

Files in This Item:
File SizeFormat 
conference_tpu-2019-C108_p192.pdf458,94 kBAdobe PDFView/Open

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.