Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/57740
Title: High-rate deposition of chromium coatings by magnetron sputtering
Authors: Sidelev, Dmitry Vladimirovich
Bleykher, Galina Alekseevna
Grudinin, Vladislav Alekseevich
Krivobokov, Valery Pavlovich
Bestetti, Massimiliano
Keywords: высокоскоростное осаждение; хромовые покрытия; магнетронное распыление; мишени; подложки
Issue Date: 2019
Citation: High-rate deposition of chromium coatings by magnetron sputtering / D. V. Sidelev [et al.] // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 192].
URI: http://earchive.tpu.ru/handle/11683/57740
Appears in Collections:Материалы конференций

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