Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/57759
Title: Features of self-sustained magnetron sputtering of evaporating metal target
Authors: Bleykher, Galina Alekseevna
Yuryeva, Alena Victorovna
Shabunin, Artem Sergeevich
Sidelev, Dmitry Vladimirovich
Grudinin, Vladislav Alekseevich
Keywords: магнетронное распыление; металлические мишени; магнетроны; осаждение; покрытия; самораспыление; магнетронные распылительные системы
Issue Date: 2019
Citation: Features of self-sustained magnetron sputtering of evaporating metal target / G. A. Bleykher [et al.] // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 277].
URI: http://earchive.tpu.ru/handle/11683/57759
Appears in Collections:Материалы конференций

Files in This Item:
File SizeFormat 
conference_tpu-2019-C108_p277.pdf337,71 kBAdobe PDFView/Open


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.