Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/64520
Title: Medical nanofilms of titanium oxynitride deposited by reactive magnetron sputtering
Authors: Boytsova, Elena Lvovna
Leonova, Liliya Aleksandrovna
Keywords: нанопленки; оксинитрид титана; магнетронное распыление
Issue Date: 2016
Citation: Boytsova E. L. Medical nanofilms of titanium oxynitride deposited by reactive magnetron sputtering / E. L. Boytsova, L. A. Leonova // Nanoparticles, nanostructured coatings and microcontainers: technology, properties, applications : 7th International Conference, May 12-15, 2016, Tomsk, Russia. — Tomsk, 2016. — [P. 54].
URI: http://earchive.tpu.ru/handle/11683/64520
Appears in Collections:Материалы конференций

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