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Title: | Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N |
Authors: | Fedorischeva, Marina Sergeev, Viktor Petrovich Kalashnikov, Mark Petrovich Voronov, Andrei |
Keywords: | внутреннее напряжение; многослойные покрытия; фазовый состав; слои; рентгеновские исследования; ПЭМ; просвечивающая электронная микроскопия |
Issue Date: | 2014 |
Publisher: | AIP Publishing |
Citation: | Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N / M. V. Fedorischeva [et al.] // AIP Conference Proceedings. — 2014. — Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014 : [proceedings]. — [P. 147-150]. |
Abstract: | X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basicallynanocrystalline ZrO2 and the layers on the basis of Si-Al-N contain Si3N4 amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that thecrystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer. |
URI: | http://earchive.tpu.ru/handle/11683/35688 |
Appears in Collections: | Материалы конференций |
Files in This Item:
File | Description | Size | Format | |
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dx.doi.org-10.1063-1.4898904.pdf | 460,07 kB | Adobe PDF | View/Open |
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