Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/35862| Title: | A comparative study on the properties of chromium coatings deposited by agnetron sputtering with hot and cooled cathode |
| Authors: | Bestetti, Massimiliano Vicenzo, Antonello Franz, Silvia Francesca Brunella, Maria Sidelev, Dmitry Vladimirovich Bleykher, Galina Alekseevna Krivobokov, Valery Pavlovich |
| Keywords: | сравнительные исследования; хромовые покрытия; магнетронное распыление; холодные катоды; выпаривание; осаждение; magnetron sputtering; hot target; evaporation; chromium; high deposition rate |
| Issue Date: | 2016 |
| Citation: | A comparative study on the properties of chromium coatings deposited by agnetron sputtering with hot and cooled cathode / M. Bestetti [et al.] // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 338]. |
| URI: | http://earchive.tpu.ru/handle/11683/35862 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2016-C117_p339.pdf | 177,15 kB | Adobe PDF | View/Open |
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