Внедрение водорода в титан плазменными методами

Abstract

In the present work, the mechanisms of interaction of hydrogen with titanium during the introduction of hydrogen by plasma methods were investigated. Hydrogen was introduced from the hydrogen plasma of a high-frequency discharge (HFD) and was implanted from gas-discharge plasma on the basis of a "PINK" source. Implantation results in significant hydrogen enrichment of the near-surface layer to a depth of 0.6 µm. Implantation does not lead to significant change in the crystalline parameters and the creation of hydride phases. The obtained results suggest the following features of the hydrogen introduction. When irradiated with low energy H+ ions from the "PINK" source, most of it is reflected from the surface and does not pass into the volume. H+ ions of the HFD plasma interact with the sample surface with thermal energies, and hydrogen is captured by surface defects with subsequent diffusion to volume defects.