Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/57752
Title: | Characterization of magnetron plasma using optical spectroscopy and collisional-radiative model of nitrogen |
Authors: | Evdokimov, Kirill Evgenievich Konishchev, Maksim Evgenievich Pichugin, Vladimir Fyodorovich Sun, Z. |
Keywords: | магнетронная плазма; оптическая спектроскопия; азот; столкновительно-излучательные процессы; магнетронные разряды; газовые смеси; пространственная неоднородность; низкотемпературная плазма; характеристики |
Issue Date: | 2019 |
Citation: | Characterization of magnetron plasma using optical spectroscopy and collisional-radiative model of nitrogen / K. E. Evdokimov [et al.] // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 66]. |
URI: | http://earchive.tpu.ru/handle/11683/57752 |
Appears in Collections: | Материалы конференций |
Files in This Item:
File | Description | Size | Format | |
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conference_tpu-2019-C108_p66.pdf | 555,33 kB | Adobe PDF | View/Open |
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