Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/65007
Title: | Calculation of energy release function of focused ion beam in solids |
Authors: | Ryabkina, X. S. |
metadata.dc.contributor.advisor: | Stepanova, Olga Mikhailovna Demyanenko, Natalia Vladimirovna |
Keywords: | энерговыделение; ионные пучки; твердые тела; металлы; мишени; пространственно-временные функции |
Issue Date: | 2014 |
Publisher: | Томский политехнический университет |
Citation: | Ryabkina X. S. Calculation of energy release function of focused ion beam in solids / X. S. Ryabkina ; Sci. adv. O. M. Stepanova, N. V. Demyanenko // Методология проектирования молодежного научно-инновационного пространства как основа подготовки современного инженера : сборник научных трудов Международной молодежной научной школы, г. Томск, 2 - 4 апреля 2014 г. — Томск : Изд-во ТПУ, 2014. — [С. 185-189]. |
Abstract: | The mathematical formulation of space-time energy release function of accelerated ions in solids is presented. Continuous focused ion beam interaction with metals is considered. The power density of deposited energy and specific energy input in a target has been calculated. A beam energy fraction expended on the collisional sputtering of target atoms has been estimated. |
URI: | http://earchive.tpu.ru/handle/11683/65007 |
Appears in Collections: | Материалы конференций |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
conference_tpu-2014-C07_p185-189.pdf | 224,09 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.