Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/57759| Title: | Features of self-sustained magnetron sputtering of evaporating metal target |
| Authors: | Bleykher, Galina Alekseevna Yuryeva, Alena Victorovna Shabunin, Artem Sergeevich Sidelev, Dmitry Vladimirovich Grudinin, Vladislav Alekseevich |
| Keywords: | магнетронное распыление; металлические мишени; магнетроны; осаждение; покрытия; самораспыление; магнетронные распылительные системы |
| Issue Date: | 2019 |
| Citation: | Features of self-sustained magnetron sputtering of evaporating metal target / G. A. Bleykher [et al.] // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 277]. |
| URI: | http://earchive.tpu.ru/handle/11683/57759 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2019-C108_p277.pdf | 337,71 kB | Adobe PDF | View/Open |
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