Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/64520| Title: | Medical nanofilms of titanium oxynitride deposited by reactive magnetron sputtering |
| Authors: | Boytsova, Elena Lvovna Leonova, Liliya Aleksandrovna |
| Keywords: | нанопленки; оксинитрид титана; магнетронное распыление |
| Issue Date: | 2016 |
| Citation: | Boytsova E. L. Medical nanofilms of titanium oxynitride deposited by reactive magnetron sputtering / E. L. Boytsova, L. A. Leonova // Nanoparticles, nanostructured coatings and microcontainers: technology, properties, applications : 7th International Conference, May 12-15, 2016, Tomsk, Russia. — Tomsk, 2016. — [P. 54]. |
| URI: | http://earchive.tpu.ru/handle/11683/64520 |
| Appears in Collections: | Материалы конференций |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2016-C116_p54.pdf | 208,44 kB | Adobe PDF | View/Open |
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