Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/35829| Title: | Determination of magnetron plasma parameters by optical emission spectroscopy and argon collisional-radiative model |
| Authors: | Evdokimov, Kirill Evgenievich Konishchev, Maksim Evgenievich Pichugin, Vladimir Fyodorovich Sun Zhilei |
| Keywords: | плазма; оптическая спектроскопия; эмиссионная спектроскопия; аргон; optical emission spectroscopy; collisional-radiative model; magnetron plasma |
| Issue Date: | 2016 |
| Citation: | Determination of magnetron plasma parameters by optical emission spectroscopy and argon collisional-radiative model / K. E. Evdokimov [et al.] // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 193]. |
| URI: | http://earchive.tpu.ru/handle/11683/35829 |
| Appears in Collections: | Материалы конференций |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2016-C117_p194.pdf | 228,29 kB | Adobe PDF | View/Open |
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