Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/35833
Title: The energy flux onto substrate during coating deposition using magnetron with liquid metal target
Authors: Bleykher, Galina Alekseevna
Borduleva, Alena Olegovna
Yuryeva, Alena Victorovna
Keywords: энергия; подложки; покрытия; магнетроны; мишени; жидкие металлы; магнетронное распыление; поток энергии; жидкие фазы; magnetron sputtering; evaporation; energy flux onto substrate; liguid-phase target
Issue Date: 2016
Citation: Bleykher G. A. The energy flux onto substrate during coating deposition using magnetron with liquid metal target / G. A. Bleykher, A. O. Borduleva, A. V. Yuryeva // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 234].
URI: http://earchive.tpu.ru/handle/11683/35833
Appears in Collections:Материалы конференций

Files in This Item:
File SizeFormat 
conference_tpu-2016-C117_p235.pdf220,76 kBAdobe PDFView/Open


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.