Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/57741| Title: | Temperature gradients in targets with high-intensity implantation and their influence on the characteristics of ion-modified layers |
| Authors: | Ryabchikov, Aleksandr Ilyich Lopatin, I. V. Ananin, Petr Semenovich Bleicher, Galina Alekseevna Ivanova, Anna Ivanovna Koval, Tamara Vasilievna Modebadze, Georgy Slavovich Sivin, Denis Olegovich |
| Keywords: | имплантация; мишени; ионно-модифицированные слои; температурные поля; металлические мишени; интенсивные пучки; ионы металлов; температурные градиенты |
| Issue Date: | 2019 |
| Citation: | Temperature gradients in targets with high-intensity implantation and their influence on the characteristics of ion-modified layers / A. I. Ryabchikov [et al.] // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 51]. |
| URI: | http://earchive.tpu.ru/handle/11683/57741 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2019-C108_p51.pdf | 369,18 kB | Adobe PDF | View/Open |
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