Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/35828| Title: | Analysis of work and increasing of efficiency of the ILUR-03 installation magnetron system for tubular specimens outer surface modification |
| Authors: | Volkov, Nikolay Yashin, Alexander Kalin, Boris Valikov, Roman Krivobokov, Valery Pavlovich Yanin, Sergey Nikolaevich Yuriev, Yuri Nikolaevich |
| Keywords: | магнетроны; трубчатые образцы; модификация; поверхности; пучки; ионы; распыление; тонкие пленки; ion beam; magnetron; sputtering; thin films; modification |
| Issue Date: | 2016 |
| Citation: | Analysis of work and increasing of efficiency of the ILUR-03 installation magnetron system for tubular specimens outer surface modification / N. Volkov [et al.] // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 180]. |
| URI: | http://earchive.tpu.ru/handle/11683/35828 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2016-C117_p181.pdf | 218,96 kB | Adobe PDF | View/Open |
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