Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/35831
Title: | The influence of plasma parameters on the electron temperature and density |
Authors: | Tsapkov, Alexander Mukhametkaliev, Timur Mukhamedrashidovich Evdokimov, Kirill Evgenievich Surmeneva (Ryabtseva), Maria Alexandrovna Surmenev, Roman Anatolievich |
Keywords: | плазма; электронная температура; плотность; плазменная обработка; оптическая спектроскопия; эмиссионная спектроскопия; plasma treatment; RF-magnetron plasma; optical emission spectroscopy |
Issue Date: | 2016 |
Citation: | The influence of plasma parameters on the electron temperature and density / A. Tsapkov [et al.] // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 225]. |
URI: | http://earchive.tpu.ru/handle/11683/35831 |
Appears in Collections: | Материалы конференций |
Files in This Item:
File | Description | Size | Format | |
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conference_tpu-2016-C117_p226.pdf | 226,79 kB | Adobe PDF | View/Open |
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