Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/57378| Title: | Operation parameters of magnetron diode for high-rate deposition of aluminum films |
| Authors: | Sidelev, Dmitry Vladimirovich Grudinin, Vladislav Alekseevich |
| Keywords: | магнетронный разряд; плазма; осаждение; алюминиевые пленки |
| Issue Date: | 2018 |
| Publisher: | IOP Publishing |
| Citation: | Sidelev D. V. Operation parameters of magnetron diode for high-rate deposition of aluminum films / D. V. Sidelev, V. A. Grudinin // Journal of Physics: Conference Series. — 2018. — Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects"14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM) : [proceedings], 16-22 September 2018, Tomsk, Russian Federation. — [032020, 5 p.]. |
| Abstract: | This article reports on the results of the detailed study of erosion of Al target in magnetron discharge plasma. It was demonstrated that the combination of middle-frequency (MF) and high impulse power (HiPIMS) power supply results in the significant increase of deposition rates of Al films by changing of sputtering yield. The MF pulse assists HiPIMS discharge to transit in a high power mode. |
| URI: | http://earchive.tpu.ru/handle/11683/57378 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conf-nw-28938.pdf | 847,82 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.