Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/64521| Title: | The nonisothermal model of the initial stage of ion implantation process |
| Authors: | Parfenova, Elena Sergeevna |
| Keywords: | ионная имплантация; обработка; материалы; поверхностные слои; диффузия примесей; механические напряжения; компьютерное моделирование |
| Issue Date: | 2016 |
| Citation: | Parfenova E. S. The nonisothermal model of the initial stage of ion implantation process / E. S. Parfenova // Nanoparticles, nanostructured coatings and microcontainers: technology, properties, applications : 7th International Conference, May 12-15, 2016, Tomsk, Russia. — Tomsk, 2016. — [P. 51]. |
| URI: | http://earchive.tpu.ru/handle/11683/64521 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2016-C116_p51.pdf | 208,17 kB | Adobe PDF | View/Open |
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