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http://earchive.tpu.ru/handle/11683/74890| Title: | Combined HF+MW CVD Approach for the Growth of Polycrystalline Diamond Films with Reduced Bow |
| Authors: | Sedov, Vadim Popovich, Alexey Linnik, Stepan Andreevich Martyanov, Artem Wei, Junjun Zenkin, Sergey Petrovich Zavedeev, Evgeny Savin, Sergey Gaydaychuk, Alexander Valerievich Li, Chengming Ralchenko, Victor Konov, Vitaly |
| Keywords: | алмаз; тонкие пленки; химическое осаждение; микроволновая плазма; теплопроводность; рамановская спектроскопия; diamond; thin film; chemical vapor deposition; microwave plasma; thermal conductivity; Raman spectroscopy |
| Issue Date: | 2023 |
| Publisher: | MDPI AG |
| Citation: | Combined HF+MW CVD Approach for the Growth of Polycrystalline Diamond Films with Reduced Bow / V. Sedov, A. Popovich, S. A. Linnik [et al.] // Coatings. — 2023. — Vol. 13, iss. 2. — [380, 10 p.]. |
| Abstract: | A combination of two methods of chemical vapor deposition (CVD) of diamond films, microwave plasma–assisted (MW CVD) and hot filament (HF CVD), was used for the growth of 100 µm-thick polycrystalline diamond (PCD) layers on Si substrates. The bow of HF CVD and MW CVD films showed opposite convex\concave trends; thus, the combined material allowed reducing the overall bow by a factor of 2–3. Using MW CVD for the growth of the initial 25 µm-thick PCD layer allowed achieving much higher thermal conductivity of the combined 110 µm-thick film at 210 W/m?K in comparison to 130 W/m?K for the 93 µm-thick pure HF CVD film. |
| URI: | http://earchive.tpu.ru/handle/11683/74890 |
| Appears in Collections: | Репринты научных публикаций |
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|---|---|---|---|---|
| reprint-nw-40496.pdf | 713,29 kB | Adobe PDF | View/Open |
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