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http://earchive.tpu.ru/handle/11683/35730| Title: | Cellular automata modeling of microcrystalline structure formation |
| Authors: | Mikolaychuk, Mikhail Knyazeva, Anna Georgievna |
| Keywords: | клеточные автоматы; микрокристаллические структуры; магнетронное распыление; покрытия; магнетронное напыление; плазма; химическая кинетика |
| Issue Date: | 2014 |
| Publisher: | AIP Publishing |
| Citation: | Mikolaychuk M. Cellular automata modeling of microcrystalline structure formation / M. Mikolaychuk, A. G. Knyazeva // AIP Conference Proceedings. — 2014. — Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014 : [proceedings]. — [P. 419-422]. |
| Abstract: | The paper discusses the problem of microcrystalline structure formation during magnetron sputtering. The authors suggest the model based on cellular automata approach combined with chemical kinetics considerations, briefly discuss a practical way for kinetic constants evaluation and derive their accurate values. The work numerically solves a particular problem of coating formation by magnetron sputter deposition in multicomponent chemically active plasma. |
| URI: | http://earchive.tpu.ru/handle/11683/35730 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| dx.doi.org-10.1063-1.4898971.pdf | 732,17 kB | Adobe PDF | View/Open |
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