Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/35833| Title: | The energy flux onto substrate during coating deposition using magnetron with liquid metal target |
| Authors: | Bleykher, Galina Alekseevna Borduleva, Alena Olegovna Yuryeva, Alena Victorovna |
| Keywords: | энергия; подложки; покрытия; магнетроны; мишени; жидкие металлы; магнетронное распыление; поток энергии; жидкие фазы; magnetron sputtering; evaporation; energy flux onto substrate; liguid-phase target |
| Issue Date: | 2016 |
| Citation: | Bleykher G. A. The energy flux onto substrate during coating deposition using magnetron with liquid metal target / G. A. Bleykher, A. O. Borduleva, A. V. Yuryeva // Energy Fluxes and Radiation Effects (EFRE-2016) : International Congress, October 2–7, 2016, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2016. — [P. 234]. |
| URI: | http://earchive.tpu.ru/handle/11683/35833 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2016-C117_p235.pdf | 220,76 kB | Adobe PDF | View/Open |
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