Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/57740
Title: | High-rate deposition of chromium coatings by magnetron sputtering |
Authors: | Sidelev, Dmitry Vladimirovich Bleykher, Galina Alekseevna Grudinin, Vladislav Alekseevich Krivobokov, Valery Pavlovich Bestetti, Massimiliano |
Keywords: | высокоскоростное осаждение; хромовые покрытия; магнетронное распыление; мишени; подложки |
Issue Date: | 2019 |
Citation: | High-rate deposition of chromium coatings by magnetron sputtering / D. V. Sidelev [et al.] // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 192]. |
URI: | http://earchive.tpu.ru/handle/11683/57740 |
Appears in Collections: | Материалы конференций |
Files in This Item:
File | Description | Size | Format | |
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conference_tpu-2019-C108_p192.pdf | 458,94 kB | Adobe PDF | View/Open |
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