Please use this identifier to cite or link to this item: http://earchive.tpu.ru/handle/11683/57739
Title: Formation of the silicon coating on the NiTi substrate by magnetron sputteringi
Authors: Luchin, A. V.
Krukovskii, K. V.
Kashin, O. A.
Keywords: формирование; покрытия; подложки; магнетронное распыление; кремний
Issue Date: 2019
Citation: Luchin A. V. Formation of the silicon coating on the NiTi substrate by magnetron sputteringi / A. V. Luchin, K. V. Krukovskii, O. A. Kashin // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 190].
URI: http://earchive.tpu.ru/handle/11683/57739
Appears in Collections:Материалы конференций

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