Please use this identifier to cite or link to this item:
http://earchive.tpu.ru/handle/11683/57739| Title: | Formation of the silicon coating on the NiTi substrate by magnetron sputteringi |
| Authors: | Luchin, A. V. Krukovskii, K. V. Kashin, O. A. |
| Keywords: | формирование; покрытия; подложки; магнетронное распыление; кремний |
| Issue Date: | 2019 |
| Citation: | Luchin A. V. Formation of the silicon coating on the NiTi substrate by magnetron sputteringi / A. V. Luchin, K. V. Krukovskii, O. A. Kashin // Gas Discharge Plasmas and Their Applications (GDP 2019) : 14th International Conference, September 15–21, 2019, Tomsk, Russia : abstracts. — Tomsk : TPU Publishing House, 2019. — [С. 190]. |
| URI: | http://earchive.tpu.ru/handle/11683/57739 |
| Appears in Collections: | Материалы конференций |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| conference_tpu-2019-C108_p190.pdf | 621,89 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.